Imaging1

[XOPT6-03(Invited)] High-throughput nanoscale ptychographic tomography achieved with rapid scanning microscopy instrument at HXN beamline

*Zirui Gao¹, Weihe Xu¹, Wei Xu¹, Hanfei Yan¹, Dmitri Gavrilov¹, Huijuan Xu¹, Aaron Michelson¹, Yong Chu¹, Evgeny Nazaretski¹, Xiaojing Huang¹ (1. Brookhaven National Laboratory)

The RASMI-II instrument at NSLS-II enables high-throughput ptychographic tomography imaging. It utilizes rapid flyscanning and 3D position tracking to achieve sub-20 nm resolution in less than 1 hour, as demonstrated on microelectronics samples.