XOPT Poster Session

[XOPTp-11] Development of high-resolution X-ray microscope with multilayer AKB mirror for 17.5 keV X-ray

*Satsuki Ito¹, Kazuhiko Omote², Raita Hirose², Takato Inoue^1,3, Sota Nakabayashi¹, Haruhito Iriyama¹, Jumpei Yamada³, Yoshiki Kohmura⁴, Makina Yabashi⁴, Satoshi Matsuyama^1,3 (1. Nagoya University, 2. Rigaku Corporation, 3. Osaka University, 4. RIKEN)

A high-resolution X-ray microscope was developed with a large-NA multilayer AKB mirror for 17.5 keV X-rays. A performance test conducted at SPring-8 demonstrated that minimum structure with 20 nm width of a test chart could be clearly resolved.