Plasma Conference 2017

Presentation information

Poster Presentation

[21P] Poster 1

Tue. Nov 21, 2017 1:30 PM - 3:30 PM Poster (1F Exhibition Hall)

1:30 PM - 3:30 PM

[21P-122] Design and matching of tailored voltage waveforms on plasma process.

*Kenji Yamaki1, Daisuke Yamashita1, Hyunwoong Seo1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1. kyushu univ. isee)

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