[21P] Poster 1

[21P-132] Spectroscopic Investigation of Water Plasma Ashing Process for Various Polymer Film

*Taishin Shimada¹, Hiroaki Suzuki¹, Tatsuo Ishijima¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹, Kazuma Takamori², Takashi Nishiyama², Hideo Horibe² (1. Kanazawa Univ., 2. Osaka City Univ.)