Plasma Conference 2017

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Poster Presentation

[21P] Poster 1

Tue. Nov 21, 2017 1:30 PM - 3:30 PM Poster (1F Exhibition Hall)

1:30 PM - 3:30 PM

[21P-68] Surface Morphology changes of SiC by helium plasma irradiation

*Naoto Yamashita1, Kohei Omori1, Yoshihiro Kimura1, Irsu Mun1, Tatsuya Hinoki2, Kenzo Ibano1, Heun Tae Lee1, Yoshio Ueda1 (1. Osaka Univ. Graduate School, 2. Institute of Advanced Energy, Kyoto Univ. )

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