Memory Effect on a Metal Ion Beam Extraction from a Magnetron Sputter type RF driven Ion Source

Hirotsugu Koma

1:30 PM - 3:30 PM

[21P-70] Memory Effect on a Metal Ion Beam Extraction from a Magnetron Sputter type RF driven Ion Source

*Hirotsugu Koma¹, Kentaro Yoshioka², Takahiro Kenmotsu³, Motoi Wada² (1. Faculty of Science and Engineering, Doshisha Univ. , 2. Graduate School of Science and Engineering, Doshisha Univ. , 3. Faculty of Life and Medical Science, Doshisha Univ. )

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Presentation information

[21P] Poster 1

[21P-70] Memory Effect on a Metal Ion Beam Extraction from a Magnetron Sputter type RF driven Ion Source

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