[21P] Poster 1

[21P-82] Conductance Measurement of He Plasma Induced Nano-structure

*Yoshihiro Kimura¹, Kenzo Ibano¹, Kohei Ohmori¹, Naoto Yamashita¹, LEE Heun Tae¹, Yoshio Ueda¹ (1. Graduate School of Engineering, Osaka Univ. , 2. The Institute of Scientific and Industrial Research Osaka Univ. )