[21P] Poster 1

[21P-83] Characteristics and industrial applications of afterglows of high-repetition nano-second pulsed plasmas under sub-atmospheric pressure generated by an SiC-MOSFET inverter power supply

*Yusuke Kikuchi¹, Takuya Maegawa¹, Akira Otsubo², Yoshimi Nishimura², Masayoshi Nagata¹, Mitsuyasu Yatsuzuka¹ (1. Univ. of Hyogo, 2. Kurita Seisakusho Co., Ltd.)