Plasma Conference 2017

Presentation information

Poster Presentation

[21P] Poster 1

Tue. Nov 21, 2017 1:30 PM - 3:30 PM Poster (1F Exhibition Hall)

1:30 PM - 3:30 PM

[21P-96] Development of a magnetic-field-controlled helicon sputtering device for minimal Fab.

*Taichi SAITO1, Kazunori TAKAHASHI1, Akira ANDO1, Shiro HARA2 (1. Dept. Electrical Eng., Tohoku Univ., 2. AIST)

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