Plasma Conference 2017

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Oral Presentation

[22Ga] Session 9

Wed. Nov 22, 2017 9:00 AM - 11:30 AM Room G (7F 702)

Chairperson: Noriyasu OHNO(Nagoya Univ.)

10:30 AM - 10:50 AM

[22Ga-05] Helium plasma irradiation effect during tungsten deposition

*Shin Kajita1, Shota Kawaguchi2, Hwangbo Dogyun2, Naoaki Yoshida3, Noriyasu Ohno2 (1. IMaSS, Nagoya Univ. , 2. Grad. School of Eng., Nagoya Univ., 3. Kyushu Univ.)

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