Plasma Conference 2017

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Poster Presentation

[22P] Poster 2

Wed. Nov 22, 2017 4:45 PM - 6:45 PM Poster (1F Exhibition Hall)

4:45 PM - 6:45 PM

[22P-137] Improvement of Si network order of a-Si:H thin films controlling substrate temperature

*kazuma tanaka1, takashi kojima1, susumu toko1, daisuke yamashita1, hyunwoong seo1, naho itagaki1, kazunori koga1, masaharu shiratani1 (1. Kyushu Univ.)

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