Plasma Conference 2017

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Oral Presentation

[23Dp] Session 19

Thu. Nov 23, 2017 4:15 PM - 6:55 PM Room D (5F 503)

Chairperson: Hideaki YAMADA(AIST)

5:35 PM - 5:55 PM

[23Dp-04] Tailoring surface crystallinity and functionality of radio frequency magnetron sputtered ZnO thin films by Ar/NH3 gas mixture surface-wave plasmas

*Mihai Alexandru Ciolan1, Iuliana Motrescu1,2, Masaaki Nagatsu1 (1. Research Institute of Electronics Shizuoka Univ. , 2. Univ. of Agricultural Sciences and Veterinary Medicine of Iaşi)

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