[23Dp] セッション19 非中性・成膜

[23Dp-04] Tailoring surface crystallinity and functionality of radio frequency magnetron sputtered ZnO thin films by Ar/NH₃ gas mixture surface-wave plasmas

*Ciolan Mihai Alexandru¹、Motrescu Iuliana^1,2、Nagatsu Masaaki¹ (1. Research Institute of Electronics Shizuoka Univ. 、2. Univ. of Agricultural Sciences and Veterinary Medicine of Iaşi)