Plasma Conference 2017

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Oral Presentation

[24Da] Session 24

Fri. Nov 24, 2017 9:00 AM - 11:30 AM Room D (5F 503)

Chairperson: Haruhiko HIMURA(KIT)

9:30 AM - 9:50 AM

[24Da-03] Diagnostics of high power impulse magnetron carbon sputtering using mass spectrometry

*Kazunori Iga1, Takayuki Ohta1, Akinori Oda2, Hiroyuki Kousaka3 (1. Meijo Univ., 2. Chiba Inst. Technol., 3. Gifu Univ.)

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