[24P] Poster 4

[24P-30] Tribological characteristics of ta-C:H film deposited by reactive cathodic vacuum arc plasma deposition method

*Muhammad Aminurul Helmy Mohamad¹, Shinsuke Kunitsugu², Tatsuyuki Nakatani¹, Ichiro Shimizu¹, Koji Hirai³, Teruo Hashimoto³ (1. Okayama Univ. of Sci., 2. Indust. Techno. Cent. of Okayama, 3. TRS)