Plasma Conference 2017

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Poster Presentation

[24P] Poster 4

Fri. Nov 24, 2017 2:00 PM - 4:00 PM Poster (1F Exhibition Hall)

2:00 PM - 4:00 PM

[24P-33] Preparation of Diamond-Like Carbon Films on Polymers using Hybrid Coating Technique of DC Plasma Sputtering and Inductively Coupled Plasma with Low-Inductance Antenna

*Kunitsugu Shinsuke1, Nakanishi Ryota1, Nakatani Tatsuyuki2 (1. Industrial Technology Center of Okayama Prefecture, 2. Okayama Univ. of Science)

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