Plasma Conference 2017

Presentation information

Poster Presentation

[24P] Poster 4

Fri. Nov 24, 2017 2:00 PM - 4:00 PM Poster (1F Exhibition Hall)

2:00 PM - 4:00 PM

[24P-38] Deposition of AlN Thin Films Using ICP-enhanced Reactive DC-pulsed Sputtering

*Kosuke Takenaka1, Giichiro Uchida1, Yuichi Setsuhara1 (1. Osaka Univ.)

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