[24P] Poster 4

[24P-39] Damage to the optical system by laser-driven EUV light source and mitigation of sputtered particles

*Nao Wada¹, Nozomi Tanaka¹, Yasuyuki Kageyama², Akifumi Yogo¹, Hiroaki Nishimura¹ (1. Institute of Laser Engineering, 2. TOYOTA CRDL, INC.)