Effect of silicon addition on diamond-like carbon film formation using sputtering

Presentation information

Poster Presentation

Fri. Nov 24, 2017 2:00 PM - 4:00 PM Poster (1F Exhibition Hall)

2:00 PM - 4:00 PM

*Yuki Miwa¹, Takayuki Ohta¹, Akinori Oda², Hiroyuki Kousaka³ (1. Meijo Univ., 2. Chiba Inst. Technol., 3. Gifu Univ.)

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