Plasma Conference 2017

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Poster Presentation

[24P] Poster 4

Fri. Nov 24, 2017 2:00 PM - 4:00 PM Poster (1F Exhibition Hall)

2:00 PM - 4:00 PM

[24P-52] Fabrication of high-quality ZnO films on Si(111) substrates by magnetron sputtering: Effects of buffer layers prepared via nitrogen mediated crystallization

*Kazuya Iwasaki1, Jiahao Lyu1, Daisuke Yamashita1, Hyunwoong Seo1, Kazunori Koga1, Masaharu Shiratani1, Naho Itagaki1 (1. Kyushu Univ.)

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