Plasma Conference 2017

Presentation information

Print

Poster Presentation

[24P] Poster 4

Fri. Nov 24, 2017 2:00 PM - 4:00 PM Poster (1F Exhibition Hall)

2:00 PM - 4:00 PM

[24P-54] Etching process of WSe2 using Inward-Plasma

*Jun Miyawaki1, Toshitaka Kubo1, Tetsuo Shimizu1, Shun'ichiro Shimbori2, Satoshi Takahashi2, Kazuhiro Endo3, Atsushi Ando1 (1. AIST, 2. Sanyu Co., Ltd., 3. Kanazawa Inst. Tech.)

Abstract password authentication.
Password is required to view the abstract. Please enter a password to authenticate.

Password