Development of a spectroscopic ellipsometry system for real-time and in-situ diagnostics of wall surface

Yu Suzuki

2:00 PM - 4:00 PM

[24P-60] Development of a spectroscopic ellipsometry system for real-time and in-situ diagnostics of wall surface

*Yu Suzuki¹, Mizuki Sakamoto¹, Shuntaro Ino¹, Ryuichi Sakamoto², Mitsutaka Miyamoto³, Naomichi Ezumi¹, Yousuke Nakashima¹ (1. PRC, Univ. of Tsukuba, 2. NIFS, 3. Univ. of Shimane)

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Presentation information

[24P] Poster 4

[24P-60] Development of a spectroscopic ellipsometry system for real-time and in-situ diagnostics of wall surface

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