Plasma Conference 2017

Presentation information

Print

Workshop

[WS] Workshop

Mon. Nov 20, 2017 1:00 PM - 4:40 PM Room F (7F 701)

Chairperson: Masaharu Shiratani(Kyushu Univ.), Giichiro Uchida(Osaka Univ.)

4:10 PM - 4:40 PM

[WS-07] 7. フレキサブルMEMSの創製に向けたプラズマナノプロセスの深化

*Kazuo Terashima1,2, *Tsuyohito Ito1,2, *Taku Goto1,2, *Masanao Tsumaki1, *Naritaka Sakakibara1,2 (1. Univ. of Tokyo, 2.AIST OIL)

Abstract password authentication.
Password is required to view the abstract. Please enter a password to authenticate.

Password