Engineering Session 4

[E-O4-03] Study on relationship between nano particle agglomeration action and polishing characteristics in CMP (C000252)

*Mohammed Ahmed Yousof Abdelhakeem Bakier¹, Keisuke Suzuki¹, Panart Khajornrungruang¹ (1. Kyushu Institute of Technology)

キーワード：MRR, Particle agglomeration, CMP, particle force