Schedule 1 3:00 PM - 5:00 PM [E-P2-17] In-Line Inspection of Edge Detection (C000346) *JINGWEI Wang1, Tatsuki OTSUBO1, Yoshiki TANAKA1, Tatsushi MORI1, Takanori YAZAWA1 (1. Nagasaki University) Keywords:inspection, in-line, in-situ, dimension, burr, non-measurement