スケジュール 1 15:00 〜 17:00 [E-P2-17] In-Line Inspection of Edge Detection (C000346) *JINGWEI Wang1, Tatsuki OTSUBO1, Yoshiki TANAKA1, Tatsushi MORI1, Takanori YAZAWA1 (1. Nagasaki University) キーワード:inspection, in-line, in-situ, dimension, burr, non-measurement