Material Science and Applied Engineering Session 2

[M-O2-01] Crystallization processes of Amorphous Hf_0.5Zr_0.5O₂ Thin Films on Thermal Annealing: TEM and XRD studies (C000027)

*Ryota Fujio¹, Manabu Ishimaru¹, Shinji Migita², Noriyuki Uchida² (1. Kyushu Institute of Technology, Kitakyushu, Fukuoka/Japan, 2. Advanced Industrial Science and Technology, Tsukuba, Ibaraki/Japan)

Keywords:Dielectric material, Crystallization, Transmission electron microscopy