*Kazuhiro Omori¹, Kenichi Matsumoto¹, Azumi Kobayashi¹, Tomonobu Funayama², Makoto Ikezoe³, Yoshikazu Ota³, Hiroshi Kobashikawa³, Kenta Tanikoshi³ (1. Industrial Technology Center of Tochigi Prefecture, 2. Ashizawa Finetech Ltd., 3. Sakae Industry INC.)

*Noboru Yamamoto¹, Toshio Takahata² (1. Toide Kasei Co., Ltd. Tokyo Office, 2. Toide Kasei Co., Ltd.)

*Shin Sano¹, Mami Tanaka¹, Satoshi Morikubo¹, Tomoko Hamano¹, Chen Xu¹, Takefumi Narita¹, Tomoko Shirahase¹ (1. Tokyo Metropolitan Industrial Technology Research Institute)

*karin onaka¹, kuriyama takashi¹ (1. yamagata univ.)