*Yukihiro Tanida¹, Naoya Kurahashi¹, Shuhei Okada² (1. Kyoto Prefectural Technology Center for Small and Medium Enterprises, 2. Yokogawa Electric Corporation)

*Yuichiro Koide¹, Kazutaka Isoda¹, Chihaya Fujiwara¹, Tomoko Shirahase¹ (1. Tokyo Metropolitan Industrial Technology Research Institute)

*Ren Yoshinaka¹, Masato Kondou¹, Kazutaka Mukoyama¹, Koushu Hanaki¹, Hiroshi Ishimaru¹, Tetsusei Kurashiki¹, Tatsuya Fujii², Nano Ito², Yoshinori Kaneto² (1. Graduate School of Engineering Osaka University, 2. Mitsubishi Electric)

*Akihiro Shimizu^1,2 (1. Ushio Inc., 2. Gifu Univ.)