*Lado Filipovic¹, Josip Bobinac², Julius Piso², Tobias Reiter¹ (1. CDL for Process Modeling of Semiconductor Based Devices and Sensors at the Institute for Microelectronics, TU Wien, 2. Institute for Microelectronics, TU Wien)

*Qi Li¹, Ye Chen¹, Yan Xing¹ (1. Southeast University)

*Hyunhak Jeong¹, Byungjo Kim¹, Youjung Kim², Hanmei Choi², Suyoung Yoo¹, Sang Ki Nam¹ (1. Mechatronics Res., Samsung Electronics, 2. Semiconductor R&D Center, Samsung Electronics)

*Tobias Reiter¹, Alexander Toifl², Andreas Hössinger², Lado Filipovic¹ (1. TU Wien, Inst. for Microelectronics, 2. Silvaco Europe Ltd.)

*Chihak Ahn¹, Seonghoon Jin¹, Gijae Kang², Joohyun Jeon², Hyoshin Ahn², Inkook Jang², Woosung Choi¹, Dae Sin Kim² (1. Samsung Semiconductor Inc., 2. Samsung Electronics)