TCAD Modeling of Germanium Behavior During Forming Operation in Ge-Rich ePCM

Matteo Baldo

09:30 〜 09:50

[Session_10-02] TCAD Modeling of Germanium Behavior During Forming Operation in Ge-Rich ePCM

*Matteo Baldo¹, Luca Laurin³, Elisa Petroni², Daniele Ielmini², Roberto Annunziata³, Andrea Redaelli³ (1. STMicroelectronics, Politecnico di Milano, 2. Politecnico di Milano, 3. STMicroelectronics)

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講演情報

[Session 10] Memories

[Session_10-02] TCAD Modeling of Germanium Behavior During Forming Operation in Ge-Rich ePCM

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