[Session 5] Interface and Reliability/Variability

[Session_5-02] Understanding the impact of polysilicon percolative conduction on 3D NAND variability

*Salvatore Maria Amoroso¹, Gerardo Malavena², Andrew Robert Brown¹, Plamen Asenov¹, Xi-Wei Lin¹, Victor Moroz¹, Mattia Giulianini², David Gianluigi Refaldi², Christian Monzio Compagnoni², Alessandro Sottocornola Spinelli² (1. Synopsys Inc., 2. Politecnico di Milano)