Session information

Oral Session

Plenary Session

[1] Plenary

Sun. Jun 11, 2023 8:50 AM - 9:50 AM Shunjyu I (Shunjyu I)

Chair:Katsuhiro Tomioka(Hokkaido Univ)

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8:50 AM - 9:20 AM

[1-01] CMOS Device Scaling by Nanosheet Channel Architectures and New Channel Materials

*Naoto Horiguchi¹ (1. imec (Belgium))

9:20 AM - 9:50 AM

[1-02] ALD Nanometer-Thin In2O3 for BEOL Logic, Memory and RF Applications

*Peide Ye¹ (1. Purdue University (United States of America))

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