SNW2023 in 2023 Symposium on VLSI Technology and Circuits

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Oral Session

Neuromorphic/AI Circuit Applications

[2] Machine Learning

Sun. Jun 11, 2023 9:50 AM - 10:50 AM Shunjyu I (Shunjyu I)

Chair:Woo Young Choi(Seoul National University)

10:30 AM - 10:50 AM

[2-03] Machine Learning-based Accurate Single Wafer Wet Etching Amount Prediction

*Shinsei Yoshikiyo1, Hiroshi Horiguchi2, Chihiro Matsui1, Ken Takeuchi1 (1. Univ. of Tokyo (Japan), 2. SCREEN Semiconductor Solutions (Japan))

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