Enhanced Performance for SiGe/Si Gate-All-Around Field-Effect-Transistor with Ge Condensation Using Supercritical Fluid Treatment

Wei-Ren Chen

2:50 PM - 3:10 PM

[5-02] Enhanced Performance for SiGe/Si Gate-All-Around Field-Effect-Transistor with Ge Condensation Using Supercritical Fluid Treatment

*Wei-Ren Chen¹, Dun-Bao Ruan², Kuei-Shu Chang-Liao¹, Hao-Yan Wang¹, Guang-Li Luo³, Yu-Chuan Chiu⁴, Ting-Kai Kuan¹, Po-Tsun Liu⁴ (1. National Tsing Hua University (Taiwan), 2. Fuzhou University (China), 3. Taiwan Semiconductor Research Institute (Taiwan), 4. National Yang Ming Chiao Tung University (Taiwan))

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Presentation information

[5] Advanced CMOS Technology

[5-02] Enhanced Performance for SiGe/Si Gate-All-Around Field-Effect-Transistor with Ge Condensation Using Supercritical Fluid Treatment

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