Thermal and Performance Analysis of Back-side Power Delivery Network beyond 3nm Technology Node

Presentation information

Oral Session

Si Nanoelectronics & Device Physics

Sun. Jun 11, 2023 2:30 PM - 4:30 PM Shunjyu I (Shunjyu I)

Chair:Masaharu Kobayashi(Univ. of Tokyo), Peide Ye(Purdue Univ)

3:30 PM - 3:50 PM

*Haoyu Zhang¹, Linlin Cai¹, Yutao Chen¹, Jianwen Lin¹, Wangyong Chen ¹ (1. Sun Yat-Sen Univ. (China))

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