Study of Ferroelectric HfO<sub>2</sub>-ZrO<sub>2</sub> Superlattice Poly-Si Junctionless Nanosheet Gate-all-around Field-effect-transistor and CMOS Inverter

Xin-Chan Zhong

講演情報

Oral Session

Si Nanoelectronics & Device Physics

[5] Advanced CMOS Technology

2023年6月11日(日) 14:30 〜 16:30 Shunjyu I (Shunjyu I)

Chair:Masaharu Kobayashi(Univ. of Tokyo), Peide Ye(Purdue Univ)

16:10 〜 16:30

[5-06] Study of Ferroelectric HfO₂-ZrO₂ Superlattice Poly-Si Junctionless Nanosheet Gate-all-around Field-effect-transistor and CMOS Inverter

*Xin-Chan Zhong¹, Siao-Cheng Yan¹, Ming-Yueh Huang¹, Chih-Siang Chang¹, Chong-Jhe Sun¹, Bo-An Chen¹, Yi-Wen Lin¹, Yung-Chun Wu¹ (1. National Tsing Hua University (Taiwan))

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講演情報

[5] Advanced CMOS Technology

[5-06] Study of Ferroelectric HfO2-ZrO2 Superlattice Poly-Si Junctionless Nanosheet Gate-all-around Field-effect-transistor and CMOS Inverter

パスワード

[5-06] Study of Ferroelectric HfO₂-ZrO₂ Superlattice Poly-Si Junctionless Nanosheet Gate-all-around Field-effect-transistor and CMOS Inverter