SNW2023 in 2023 Symposium on VLSI Technology and Circuits

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Oral Session

Si Nanoelectronics & Device Physics

[7] Si Nanoelectronics & Device Physics

Mon. Jun 12, 2023 8:50 AM - 10:40 AM Shunjyu I (Shunjyu I)

Chair:Takahide Oya(Yokohama National Univ.)

10:20 AM - 10:40 AM

[7-05] Modification and Ablation of Thin Silicon-on-Insulator Films by fs-Laser

*Daniel Moraru1,2, Tsutomu Kaneko1, Daniel Smith2, Tomas Katkus2, Soon Hock Ng2, Saulius Juodkazis2 (1. Shizuoka Univ. (Japan), 2. Swinburne Univ. of Tech. (Australia))

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