[8] Quantum dots

[8-02] Single-Electron Charge Sensor Self-Aligned to a Quantum Dot Array by Double-Gate Patterning Process for a Large-Scale Silicon Quantum Computer

*Takuma Kuno¹, Takeru Utsugi¹, Ryuta Tsuchiya¹, Noriyuki Lee¹, Gou Shinkai¹, Toshiyuki Mine¹, Itaru Yanagi¹, Raisei Mizokuchi², Jun Yoneda², Tetsuo Kodera², Shinichi Saito¹, Digh Hisamoto¹, Hiroyuki Mizuno¹ (1. Hitachi, Ltd. (Japan), 2. Tokyo Institute of Technology (Japan))