SNW2023 in 2023 Symposium on VLSI Technology and Circuits

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Oral Session

Qubit/Single Electron Devices

[8] Quantum dots

Mon. Jun 12, 2023 10:50 AM - 12:10 PM Shunjyu I (Shunjyu I)

Chair:Pei-Wen Li(National Yang Ming Chiao Tung Univ.)

11:30 AM - 11:50 AM

[8-03] Individual Control of Characteristics of Veritcally Stacked Silicon Quantum Dots

*Junoh KIM1, Tomoko Mizutani1, Takuya Saraya1, Hiroshi Oka2, Takahiro Mori2, Masaharu Kobayashi1,3, Toshiro Hiramoto1 (1. IIS, Univ. of Tokyo (Japan), 2. AIST (Japan), 3. d.lab, Univ. of Tokyo (Japan))

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