Optimization of Ferroelectricity in Al-Doped HfO<sub>2</sub> Capacitors: Electrical and Endurance Characteristics

Dong Ru Hsieh

[P-08] Optimization of Ferroelectricity in Al-Doped HfO₂ Capacitors: Electrical and Endurance Characteristics

*Dong Ru Hsieh¹, Huai En Luo¹, Jia Chian Ni¹, Zi Yang Hong¹, Yi Hsiu Chen¹, Wei Ju Yeh¹, Tien Sheng Chao¹ (1. National Yang Ming Chiao Tung Univ. (Taiwan))

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Presentation information

[P] Poster session

[P-08] Optimization of Ferroelectricity in Al-Doped HfO₂ Capacitors: Electrical and Endurance Characteristics

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Presentation information

[P] Poster session

[P-08] Optimization of Ferroelectricity in Al-Doped HfO2 Capacitors: Electrical and Endurance Characteristics

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[P-08] Optimization of Ferroelectricity in Al-Doped HfO₂ Capacitors: Electrical and Endurance Characteristics