SNW2023 in 2023 Symposium on VLSI Technology and Circuits

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Poster session

Poster session

[P] Poster session

Sun. Jun 11, 2023 5:00 PM - 6:30 PM Room P (Shunjyu II)

[P-16] Spherical Shallow Trench Isolation with silicon nitride layer in Buried Gate DRAM for reducing pass gate disturbance

*YeonSeok Kim1,2, ChangYoung Lim1,2, MinWoo Kwon1,2 (1. National Univ. of Gangneung-Wonju (Korea), 2. Lab. of ISDL (Korea))

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