Enhanced Electrical Performance of Ge nMOSFET with Rapid Remote Plasma Oxidation Treatment

Presentation information

Poster session

Sun. Jun 11, 2023 5:00 PM - 6:30 PM Room P (Shunjyu II)

*Jia-Cheng Liu¹, Dun-Bao Ruan², Kuei-Shu Chang-Liao¹, Guan-Ting Liu¹ (1. National Tsing Hua University (Taiwan), 2. Fuzhou University (China))

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