SNW2023 in 2023 Symposium on VLSI Technology and Circuits

Presentation information

Poster session

Poster session

[P] Poster session

Sun. Jun 11, 2023 5:00 PM - 6:30 PM Room P (Shunjyu II)

[P-23] Improved Radiation Hardness for Nanosheet FETs with Partial Bottom Dielectric Isolation

*Xun-Ting Zheng1, Vita Pi-Ho Hu1 (1. National Taiwan University (Taiwan))

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