*Athira Sunil¹, Maximilian Lederer¹, Yannick Raffel¹, Franz Müller¹, Konrad Seidel¹, Thomas Kämpfe¹, Sourav De¹(1. Fraunhofer Institute for Photonic Microsystems (Germany))

*Min Liao¹, Junshuai Chai¹, Jinjuan Xiang², Kai Han³, Yanrong Wang⁴, Hao Xu¹, Xiaolei Wang¹, Jing Zhang⁴, Wenwu Wang¹(1. Inst. of Microelectronics Chinese Academy of Sciences (China), 2. Beijing Superstring Academy of Memory Tech. (China), 3. Weifang Univ. (China), 4. North China Univ.of Tech. (China))