RF-MBE Growth of GaInN Ternary Alloys Using <i>in-situ</i> Monitoring Techniques

T. Yamaguchi

doi:https://doi.org/10.7567/SSDM.2016.D-4-01

2016 International Conference on Solid State Devices and Materials

Sep 26, 2016 - Sep 29, 2016
Tsukuba International Congress Center, Tsukuba, Japan

1:30 PM - 2:00 PM

[D-4-01(Invited)] RF-MBE Growth of GaInN Ternary Alloys Using in-situ Monitoring Techniques

^○T. Yamaguchi¹, T. Sasaki², M. Takahasi², T. Araki³, T. Onuma¹, T. Honda¹, Y. Nanishi³ (1.Kogakuin Univ.(Japan), 2.QST(Japan), 3.Ritsumeikan Univ.(Japan))

https://doi.org/10.7567/SSDM.2016.D-4-01

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