2017 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

03: CMOS Devices / Device Physics

[E-1] Reliability

Wed. Sep 20, 2017 1:30 PM - 3:15 PM Tachibana Conference Room (Conference building 2F, Sendai International Center)

Session Chair: N. Sugii(Hitachi, Ltd.), N. Mori(Osaka Univ.)

1:30 PM - 2:00 PM

[E-1-01 (Invited)] Reliability Characterizations for high-performance, low-power 10nm-FinFET technology

K. Choi1, M. Jin1, Jinju Kim1, Jungin Kim1, H. Sagong1, Y. Kim1, H. Shim1, K. Kim1, G. Kim1, S. Lee1, T. Uemura1, J. Park1, S. Shin1, S. Pae1 (1.Samsung Electronics Co., Ltd. (Korea))

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