The Japan Society of Applied Physics

3:40 PM - 4:00 PM

[G-8-02] A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors

M. Takayasu1, S. Dosho1, H. Ito1, D. Yamane1, T. Konishi1,2, K. Machida1, N. Ishihara1, K. Masu1 (1.Tokyo Tech (Japan), 2.NTT Adv. Tech. Corp. (Japan))

https://doi.org/10.7567/SSDM.2017.G-8-02