The Japan Society of Applied Physics

3:15 PM - 3:45 PM

[B-6-01 (Invited)] Atomic Layer Etching - Breaking Through the Limitation of Etch

K. Nojiri1, K.J. Kanarik2, S. Tan2, E.A. Hudson2, R.A. Gottscho2 (1.Lam Res. Co., Ltd. (Japan), 2.Lam Res. Corp. (USA))

https://doi.org/10.7567/SSDM.2018.B-6-01