Evaluation of Ferroelectricity in Si-implanted HfO<sub>2</sub> along Cycling

T. Francois

doi:https://doi.org/10.7567/SSDM.2018.C-6-02

3:45 PM - 4:00 PM

[C-6-02] Evaluation of Ferroelectricity in Si-implanted HfO₂ along Cycling

T. Francois¹,^○J. Coignus¹, L. Grenouillet¹, M. Barlas¹, B. Bessif¹, N. Vaxelaire¹, H. Boutry¹, M. Coig¹, E. Vilain¹, N. Rambal¹, Y. Morand¹, J.M. Pedini¹, F. Mazen¹, E. Nowak¹, F. Gaillard¹ (1.Univ. Grenoble Alpes, CEA, LETI (France))

https://doi.org/10.7567/SSDM.2018.C-6-02

2018 International Conference on Solid State Devices and Materials

[C-6-02] Evaluation of Ferroelectricity in Si-implanted HfO2 along Cycling

[C-6-02] Evaluation of Ferroelectricity in Si-implanted HfO₂ along Cycling